Direct simulation Monte Carlo modeling of metal vapor flows in application to thin film deposition
Autor: | Venkattraman, Ayyaswamy, Alexeenko, Alina A. |
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Zdroj: | In Vacuum 31 May 2012 86(11):1748-1758 |
Databáze: | ScienceDirect |
Externí odkaz: |
Autor: | Venkattraman, Ayyaswamy, Alexeenko, Alina A. |
---|---|
Zdroj: | In Vacuum 31 May 2012 86(11):1748-1758 |
Databáze: | ScienceDirect |
Externí odkaz: |