Direct simulation Monte Carlo modeling of metal vapor flows in application to thin film deposition
| Autor: | Venkattraman, Ayyaswamy, Alexeenko, Alina A. |
|---|---|
| Zdroj: | In Vacuum 31 May 2012 86(11):1748-1758 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Venkattraman, Ayyaswamy, Alexeenko, Alina A. |
|---|---|
| Zdroj: | In Vacuum 31 May 2012 86(11):1748-1758 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect