Selection of metal ion irradiation for controlling Ti1−xAlxN alloy growth via hybrid HIPIMS/magnetron co-sputtering
| Autor: | Greczynski, G., Lu, J., Johansson, M., Jensen, J., Petrov, I., Greene, J.E., Hultman, L. |
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| Zdroj: | In Vacuum 29 February 2012 86(8):1036-1040 |
| Databáze: | ScienceDirect |
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