Characterization of Hafnium-Zirconium-Oxide-Nitride films grown by ion beam assisted deposition
| Autor: | Jin, C.G., Yu, T., Bo, Y., Zhao, Y., Zhang, H.Y., Dong, Y.J., Wu, X.M., Zhuge, L.J., Ge, S.B. |
|---|---|
| Zdroj: | In Vacuum 29 February 2012 86(8):1078-1082 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect