Ion sputter etching of ZnO:Ga thin film surfaces

Autor: Flickyngerova, S., Netrvalova, M., Novotny, I., Bruncko, J., Gaspierik, P., Sutta, P., Tvarozek, V.
Zdroj: In Vacuum 27 January 2012 86(6):703-706
Databáze: ScienceDirect