Comparative study on dry etching of polycrystalline diamond thin films
| Autor: | Izak, Tibor, Kromka, Alexander, Babchenko, Oleg, Ledinsky, Martin, Hruska, Karel, Verveniotis, Elisseos |
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| Zdroj: | In Vacuum 27 January 2012 86(6):799-802 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect