Investigation of diffusional intermixing in Si/Co/Ta system by Secondary Neutral Mass Spectrometry
| Autor: | Lakatos, A., Erdelyi, G., Makovec, A., Langer, G.A., Csik, A., Vad, K., Beke, D.L. |
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| Zdroj: | In Vacuum 27 January 2012 86(6):724-728 |
| Databáze: | ScienceDirect |
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