An analysis of macroparticle-related defects on CrCN and CrN coatings in dependence of the substrate bias voltage
| Autor: | Warcholinski, B., Gilewicz, A., Ratajski, J., Kuklinski, Z., Rochowicz, J. |
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| Zdroj: | In Vacuum 14 March 2012 86(9):1235-1239 |
| Databáze: | ScienceDirect |
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