The influence of operating parameters on pulsed D.C. magnetron sputtering plasma
| Autor: | Karthikeyan, Sreejith, Hill, Arthur E., Cowpe, John S., Pilkington, Richard D. |
|---|---|
| Zdroj: | In Vacuum 9 November 2010 85(5):634-638 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect