Studies of radiofrequency plasma deposition of hexamethyldisiloxane films and their thermal stability and corrosion resistance behavior
Autor: | Choudhury, Arup Jyoti, Chutia, Joyanti, Kakati, Hemen, Barve, Shruti A., Pal, Arup Ratan, Sarma, Neelotpal Sen, Chowdhury, Devasish, Patil, Dinkar S. |
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Zdroj: | In Vacuum 2010 84(11):1327-1333 |
Databáze: | ScienceDirect |
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