Studies of radiofrequency plasma deposition of hexamethyldisiloxane films and their thermal stability and corrosion resistance behavior

Autor: Choudhury, Arup Jyoti, Chutia, Joyanti, Kakati, Hemen, Barve, Shruti A., Pal, Arup Ratan, Sarma, Neelotpal Sen, Chowdhury, Devasish, Patil, Dinkar S.
Zdroj: In Vacuum 2010 84(11):1327-1333
Databáze: ScienceDirect