A systematic study of DRIE process for high aspect ratio microstructuring
| Autor: | Hooda, Manish Kumar, Wadhwa, Manoj, Verma, Sanjay, Nayak, M.M., George, P.J., Paul, A.K. |
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| Zdroj: | In Vacuum 2010 84(9):1142-1148 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Hooda, Manish Kumar, Wadhwa, Manoj, Verma, Sanjay, Nayak, M.M., George, P.J., Paul, A.K. |
|---|---|
| Zdroj: | In Vacuum 2010 84(9):1142-1148 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect