Development of large diameter ECR plasma source
| Autor: | Kawai, Yoshinobu, Uchino, Kiichiro, Muta, Hiroshi, Kawai, Shinji, Röwf, Tobias |
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| Zdroj: | In Vacuum 2010 84(12):1381-1384 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Kawai, Yoshinobu, Uchino, Kiichiro, Muta, Hiroshi, Kawai, Shinji, Röwf, Tobias |
|---|---|
| Zdroj: | In Vacuum 2010 84(12):1381-1384 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect