Surface morphology and optical properties of magnetron – sputtered ultrathin Al films

Autor: Sun, Zhaoqi a, ∗, Cao, Chunbin a, b, Cao, Ling a, Liang, Ping a, Huang, Xingfa a, Song, Xueping a, b
Zdroj: In Vacuum 2010 84(6):828-832
Databáze: ScienceDirect