Effects of substrate temperature on the surface of polymer thin films prepared by R.F. sputtering with a polyimide target
| Autor: | Uemura, Akihiro, Kezuka, Kazuya, Iwamori, Satoru, Nishiyama, Itsuo |
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| Zdroj: | In Vacuum 2009 84(5):607-611 |
| Databáze: | ScienceDirect |
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