Structural changes studies of a-Si:H films deposited by PECVD under different hydrogen dilutions using various experimental techniques
| Autor: | Vavruňková, Veronika, Müllerová, Jarmila, Srnánek, Rudolf, Šutta, Pavol |
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| Zdroj: | In Vacuum 2009 84(1):123-125 |
| Databáze: | ScienceDirect |
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