Properties of (Ti,Cr)N and (Al,Cr)N thin films prepared by ion beam assisted deposition
Autor: | Budzynski, P., Sielanko, J., Surowiec, Z., Tarkowski, P. |
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Zdroj: | In Vacuum 2009 83 Supplement 1:S186-S189 |
Databáze: | ScienceDirect |
Externí odkaz: |
Autor: | Budzynski, P., Sielanko, J., Surowiec, Z., Tarkowski, P. |
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Zdroj: | In Vacuum 2009 83 Supplement 1:S186-S189 |
Databáze: | ScienceDirect |
Externí odkaz: |