Growth and properties of the ion beam deposited SiO x containing DLC films
| Autor: | Meškinis, Š., Andrulevičius, M., Šlapikas, K., Iljinas, A., Gudaitis, R., Puišo, J., Tamulevičius, S. |
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| Zdroj: | In Vacuum 2009 83 Supplement 1:S121-S123 |
| Databáze: | ScienceDirect |
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