SEM and SIMS study of the buried Si xN y layer formed in silicon
| Autor: | Saad, A.M., Frantskevich, A.V., Fedotov, A.K., Rau, E.I., Mazanik, A.V., Frantskevich, N.V., Węgierek, P., Kołtunowicz, T., Żukowski, P. |
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| Zdroj: | In Vacuum 2009 83 Supplement 1:S107-S110 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect