Fabrication of particle free epitaxal AlN thin films by reactive PLD combined with an electron beam and a rotating crucible
| Autor: | Kitahara, Tadashi, Ichikawa, Norio, Nomoto, Yoshiro |
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| Zdroj: | In Vacuum 2007 82(1):109-112 |
| Databáze: | ScienceDirect |
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