Analysis of additional leakage resulting from the feeding motion of a vacuum-compatible air bearing stage
| Autor: | Khim, Gyungho, Park, Chun-Hong, Lee, Husang, Kim, Seung-Woo |
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| Zdroj: | In Vacuum 2006 81(4):466-474 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Khim, Gyungho, Park, Chun-Hong, Lee, Husang, Kim, Seung-Woo |
|---|---|
| Zdroj: | In Vacuum 2006 81(4):466-474 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect