Self-consistent particle simulation of radio frequency SF 6 discharges: Role of ion recombination
| Autor: | Tong, Lizhu, Nanbu, Kenichi |
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| Zdroj: | In Vacuum 2006 80(9):1012-1015 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Tong, Lizhu, Nanbu, Kenichi |
|---|---|
| Zdroj: | In Vacuum 2006 80(9):1012-1015 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect