Magnetron sputtering of a vanadium-diboride target in Ar+N 2 gaseous mixtures
| Autor: | Bazhin, A.I., Goncharov, A.A., Petukhov, V.V., Radjabov, T.D., Stupak, V.A., Konovalov, V.A. |
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| Zdroj: | In Vacuum 2006 80(8):918-922 |
| Databáze: | ScienceDirect |
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