ZnO–SnO 2 transparent conductive films deposited by opposed target sputtering system of ZnO and SnO 2 targets
Autor: | Hayashi, Y. *, Kondo, K., Murai, K., Moriga, T., Nakabayashi, I., Fukumoto, H., Tominaga, K. |
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Zdroj: | In Vacuum 2004 74(3):607-611 |
Databáze: | ScienceDirect |
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