ZnO–SnO 2 transparent conductive films deposited by opposed target sputtering system of ZnO and SnO 2 targets

Autor: Hayashi, Y. *, Kondo, K., Murai, K., Moriga, T., Nakabayashi, I., Fukumoto, H., Tominaga, K.
Zdroj: In Vacuum 2004 74(3):607-611
Databáze: ScienceDirect