Coating deposition and surface modification under combined plasma processing
| Autor: | Tereshin, Vladimir *, Bandura, Andrey, Byrka, Oleg, Chebotarev, Vladimir, Garkusha, Igor, Shvets, Oleg, Taran, Valeri |
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| Zdroj: | In Vacuum 2004 73(3):555-560 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect