Modification of zirconium oxide film microstructure during post-deposition annealing
| Autor: | Ciosek, J. *, Paszkowicz, W., Pankowski, P., Firak, J., Stanislawek, U., Patron, Z. |
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| Zdroj: | In Vacuum 2003 72(2):135-141 |
| Databáze: | ScienceDirect |
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