IR and Raman absorption spectroscopic studies of APCVD, LPCVD and PECVD thin SiN films
| Autor: | Beshkov, G *, Lei, Shi, Lazarova, V, Nedev, N, Georgiev, S.S |
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| Zdroj: | In Vacuum 2002 69(1):301-305 |
| Databáze: | ScienceDirect |
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| Autor: | Beshkov, G *, Lei, Shi, Lazarova, V, Nedev, N, Georgiev, S.S |
|---|---|
| Zdroj: | In Vacuum 2002 69(1):301-305 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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