The structure of TiN films deposited by arc ion plating
| Autor: | Matsue, Tatsuya *, Hanabusa, Takao, Ikeuchi, Yasukazu |
|---|---|
| Zdroj: | In Vacuum 2002 66(3):435-439 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Matsue, Tatsuya *, Hanabusa, Takao, Ikeuchi, Yasukazu |
|---|---|
| Zdroj: | In Vacuum 2002 66(3):435-439 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect