Energetic oxygen ions in ZrO 2 deposition by reactive sputtering of Zr
| Autor: | Tominaga, Kikuo *, Kikuma, Takuya, Kusaka, Kazuya, Hanabusa, Takao |
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| Zdroj: | In Vacuum 2002 66(3):279-284 |
| Databáze: | ScienceDirect |
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| Autor: | Tominaga, Kikuo *, Kikuma, Takuya, Kusaka, Kazuya, Hanabusa, Takao |
|---|---|
| Zdroj: | In Vacuum 2002 66(3):279-284 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect