Amorphous ZnO–In 2O 3 transparent conductive films by simultaneous sputtering method of ZnO and In 2O 3 targets
| Autor: | Tominaga, K. *, Takao, T., Fukushima, A., Moriga, T., Nakabayashi, I. |
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| Zdroj: | In Vacuum 2002 66(3):505-509 |
| Databáze: | ScienceDirect |
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