Optical and structural properties of dense SiO 2, Ta 2O 5 and Nb 2O 5 thin-films deposited by indirectly reactive sputtering technique
| Autor: | Song, Yizhou *, Sakurai, Takeshi, Maruta, Kazuhiko, Matusita, Akinori, Matsumoto, Shigeharu, Saisho, Shinichiro, Kikuchi, Kazuo |
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| Zdroj: | In Vacuum 2000 59(2):755-763 |
| Databáze: | ScienceDirect |
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