Frequency Tuning of Collapse-Mode Capacitive Micromachined Ultrasonic Transducer

Autor: Pekař, Martin, Dittmer, Wendy U., Mihajlović, Nenad, van Soest, Gijs, de Jong, Nico
Zdroj: In Ultrasonics February 2017 74:144-152
Databáze: ScienceDirect