Thick aluminium nitride films deposited by room-temperature sputtering for ultrasonic applications
| Autor: | Lee, C.K., Cochran, S., Abrar, A., Kirk, K.J., Placido, F. |
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| Zdroj: | In Ultrasonics 2004 42(1):485-490 |
| Databáze: | ScienceDirect |
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| Autor: | Lee, C.K., Cochran, S., Abrar, A., Kirk, K.J., Placido, F. |
|---|---|
| Zdroj: | In Ultrasonics 2004 42(1):485-490 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect