Effect of composition on thermal stability and electrical resistivity of Ta–Si–N films
| Autor: | Olowolafe, J.O *, Rau, I, Unruh, K.M, Swann, C.P, Jawad, Z.S, Alford, T |
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| Zdroj: | In Thin Solid Films 2000 365(1):19-21 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Olowolafe, J.O *, Rau, I, Unruh, K.M, Swann, C.P, Jawad, Z.S, Alford, T |
|---|---|
| Zdroj: | In Thin Solid Films 2000 365(1):19-21 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect