Preparation of ZnF 2 and ZnF 2–BaF 2 thin films by electron cyclotron resonance plasma-enhanced chemical vapor deposition
| Autor: | Shojiya, Masanori *, Kawamoto, Yoji, Konishi, Akio, Wakabayashi, Hajimu |
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| Zdroj: | In Thin Solid Films 2000 358(1):99-103 |
| Databáze: | ScienceDirect |
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