Synthesis of tantalum pentoxide films by pulsed laser deposition: material characterization and scale-up
| Autor: | Boughaba, S *, Sproule, G.I, McCaffrey, J.P, Islam, M, Graham, M.J |
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| Zdroj: | In Thin Solid Films 2000 358(1):104-113 |
| Databáze: | ScienceDirect |
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