Finite element simulation of the development of residual stress in IAPVD films
| Autor: | Ward, D.J., Williams, A.F. * |
|---|---|
| Zdroj: | In Thin Solid Films 1 November 1999 355-356:311-315 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Ward, D.J., Williams, A.F. * |
|---|---|
| Zdroj: | In Thin Solid Films 1 November 1999 355-356:311-315 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect