Comparative study of thin film physical properties for TiNx deposited by DC magnetron sputtering under temperatures less than 100°C on monocrystalline silicon and polycrystalline iron substrates
| Autor: | Roquiny, Ph. *, Poulet, A., Leys, Y., Descamps, J.-C., Bodart, F., VandenBrande, P. |
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| Zdroj: | In Thin Solid Films 1 November 1999 355-356:357-362 |
| Databáze: | ScienceDirect |
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