Deposition of silicon carbon nitride films by ion beam sputtering
| Autor: | Wu, J.-J *, Wu, C.-T, Liao, Y.-C, Lu, T.-R, Chen, L.C, Chen, K.H, Hwa, L.-G, Kuo, C.-T, Ling, K.-J |
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| Zdroj: | In Thin Solid Films 1 November 1999 355-356:417-422 |
| Databáze: | ScienceDirect |
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