Microstructure and crystallographic texture of reactively sputtered FeTaN films
| Autor: | Klemmer, T.J. *, Inturi, V., Minor, K., Barnard, J., Thomas, J., Blachere, J. |
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| Zdroj: | In Thin Solid Films 1999 353(1):16-19 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Klemmer, T.J. *, Inturi, V., Minor, K., Barnard, J., Thomas, J., Blachere, J. |
|---|---|
| Zdroj: | In Thin Solid Films 1999 353(1):16-19 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect