Enhancement of polymerization in CH3SiO3/2 coating film by gaseous amines

Autor: Zhang, Zuyi *, Wakabayashi, Hajimu, Tanigami, Yoshinori, Terai, Ryohei
Zdroj: In Thin Solid Films 30 July 1999 349(1-2):24-28
Databáze: ScienceDirect