Surface melt dynamics and super lateral growth regime in long pulse duration excimer laser crystallization of amorphous Si films
| Autor: | Fogarassy, E a, *, de Unamuno, S a, Legagneux, P b, Plais, F b, Pribat, D b, Godard, B c, Stehle, M c |
|---|---|
| Zdroj: | In Thin Solid Films 1999 337(1):143-147 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect