Self-shadowing and surface diffusion effects in obliquely deposited thin films

Autor: Vick, D. *, Friedrich, L.J., Dew, S.K., Brett, M.J., Robbie, K., Seto, M., Smy, T.
Zdroj: In Thin Solid Films 8 February 1999 339(1-2):88-94
Databáze: ScienceDirect