Formation of titanium nitride films by energetic cluster impact deposition
| Autor: | Guoqing, Yu, Jingsheng, Chen, Ying, Shi, Haochang, Pan, Dezhang, Zhu *, Hongjie, Xu, Zhihao, Zheng |
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| Zdroj: | In Thin Solid Films 1998 335(1):59-63 |
| Databáze: | ScienceDirect |
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