Properties of Ti films produced on atomically smooth GaAs substrates by magnetron sputtering

Autor: Kazakova, Alena, Fomin, Evgenii, Levin, Aleksandr A., Nashchekin, Alexey, Shashkin, Ilya, Shuvalova, Natalya, Rastegaeva, Marina, Slipchenko, Sergey, Pikhtin, Nikita
Zdroj: In Thin Solid Films 30 August 2024 803
Databáze: ScienceDirect