Growth of boron-doped diamond-like carbon films from a low-pressure high-density plasma in inductively coupled chemical vapour deposition
| Autor: | Saha, Sucharita, Das, Debajyoti |
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| Zdroj: | In Thin Solid Films 30 May 2024 797 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect