Chemical characteristics via quantitative photoelectron analysis of chemical-solution-deposited yttrium oxide thin films for metal-insulator-metal capacitor applications
| Autor: | Ruiz-Molina, M.A., Suárez-Campos, G., Cabrera-German, D., Berman-Mendoza, D., Hu, H., Sotelo-Lerma, M. |
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| Zdroj: | In Thin Solid Films 30 March 2024 793 |
| Databáze: | ScienceDirect |
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