Structural and optical properties of silicon oxycarbide thin films using silane based precursors via sol-gel process

Autor: Hansda, Soma, Sarkar, Dipika, Kundu, Sukanya, Kar, Ajitesh, Bera, Subhankar, Das, Sanjiban, Sanyal, Dipayan, Naskar, Milan K.
Zdroj: In Thin Solid Films 29 February 2024 791
Databáze: ScienceDirect