Ion- and temperature-induced 3-dimensional nanoscale patterning in Ti1-xAlxN deposited by High Power Impulse Magnetron Sputtering
| Autor: | Warres, Clementine, Meyer, J.C., Lutz, T., Albrecht, P., Schröppel, B., Engelhart, W., Kümmel, J. |
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| Zdroj: | In Thin Solid Films 30 September 2023 781 |
| Databáze: | ScienceDirect |
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