Crystalline and optical properties of AlN films with varying thicknesses (0.4-10 µm) grown on sapphire by metalorganic chemical vapor deposition
| Autor: | Feng, Zhe Chuan, Yang, Hong, Yin, Junhua, Liu, Yao, Wu, Feng, Dai, Jiangnan, Chen, Changqing, He, Kaiyan, Wan, Lingyu, Saravade, Vishal, Yiin, Jeffrey, Klein, Benjamin, Ferguson, Ian T. |
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| Zdroj: | In Thin Solid Films 1 September 2023 780 |
| Databáze: | ScienceDirect |
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