Performance and reliability enhancement of flexible low-temperature polycrystalline silicon thin-film transistors via activation-annealing temperature optimization

Autor: Kim, Youngrok, Kim, Dongbhin, Ryu, Jinha, Shin, Jaewoo, Lee, Saemi, Choi, Byoungdeog
Zdroj: In Thin Solid Films 1 September 2023 780
Databáze: ScienceDirect