Radial microstructural nonuniformity of boron nitride films deposited on a wafer scale substrate by unbalanced magnetron sputtering
| Autor: | Choi, Y.-H., Huh, J.-Y., Baik, Y.-J. |
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| Zdroj: | In Thin Solid Films 31 March 2023 769 |
| Databáze: | ScienceDirect |
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